JPS5640971B2 - - Google Patents
Info
- Publication number
- JPS5640971B2 JPS5640971B2 JP4969375A JP4969375A JPS5640971B2 JP S5640971 B2 JPS5640971 B2 JP S5640971B2 JP 4969375 A JP4969375 A JP 4969375A JP 4969375 A JP4969375 A JP 4969375A JP S5640971 B2 JPS5640971 B2 JP S5640971B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4969375A JPS51126070A (en) | 1975-04-25 | 1975-04-25 | Weber treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4969375A JPS51126070A (en) | 1975-04-25 | 1975-04-25 | Weber treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51126070A JPS51126070A (en) | 1976-11-02 |
| JPS5640971B2 true JPS5640971B2 (en]) | 1981-09-25 |
Family
ID=12838254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4969375A Granted JPS51126070A (en) | 1975-04-25 | 1975-04-25 | Weber treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51126070A (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01179523U (en]) * | 1988-06-08 | 1989-12-22 | ||
| JPH0375185U (en]) * | 1989-11-22 | 1991-07-29 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03129732A (ja) * | 1989-07-19 | 1991-06-03 | Matsushita Electric Ind Co Ltd | 半導体の処理方法 |
| JP2012139660A (ja) * | 2011-01-05 | 2012-07-26 | Disco Corp | スピンナ洗浄装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5528419B2 (en]) * | 1973-05-29 | 1980-07-28 |
-
1975
- 1975-04-25 JP JP4969375A patent/JPS51126070A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01179523U (en]) * | 1988-06-08 | 1989-12-22 | ||
| JPH0375185U (en]) * | 1989-11-22 | 1991-07-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51126070A (en) | 1976-11-02 |